Silicon Ion Implantation Advantages In Optoelectronics

Silicon is the main material in electronic engineering. All information and computing technologies that play a key role in modern civilization are based on silicon: computers, communications, astronautics, biomedicine, robotics, and much more.

The main stumbling block on the way to increasing the speed of integrated circuits is the limited speed of electrical signal propagation in metal interconnection wiring. This requires the replacement of metal interconnections with optical waveguides and, thus, the transition from traditional electronics to optoelectronics, where the active elements are light emitters and receivers rather than transistors.

Silicon shows satisfactory performance as a light receiver, but, unlike A3B5 semiconductors, it is a poor light emitter because of an indirect bandgap of this semiconductor. To solve this problem, scientists have confirmed experimentally the increase in thermal stability of silicon doped with boron ions. With the highest previously used dose of boron ions and additional heat treatment at 830° C, it is possible to achieve a measurable level of luminescence at room temperature.

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